Technical References for C-MEMS

(CM-11-01) Carbon Interdigitated Array Nanoelectrodes for Electrochemical Applications
J. I. Heo,a D. S. Shim,a G. Turon Teixidor,c S. Oh,b,c M. J. Madou,b,c,z and H. Shina,b,z
a. School of Advanced Materials and Mechanical Engineering
b. School of Nano-Bioscience and Chemical Engineering, Ulsan National Institute of Science and Technology, Banyeon-ri 100, Ulsan 689-798, Korea
c. Dept. of Mechanical and Aerospace Engineering, University of California-Irvine, Irvine, CA 92697
Journal of The Electrochemical Society, 158, 3 J76-J80 2011

(CM-11-02) Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8
Rouabah, H.A. (Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, United Kingdom); Park, B.Y.; Zaouk, R.B.; Morgan, H.; Madou, M.J.; Green, N.G.
Journal of Micromechanics and Microengineering, 21, 3, p 035018 (9 pp.), March, 2011

(CM-10-01) Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors
Wei Chen, Majid Beidaghi, Varun Penmatsa, Kevin Bechtold, Latha Kumari, W. Z. Li,
and Chunlei (Peggy) Wang, Member, IEEE
IEEE TRANSACTIONS ON NANOTECHNOLOGY, VOL. 9, NO. 6, NOVEMBER 2010

(CM-10-02) The integration of 3D carbon-electrode dielectrophoresis on a CD-like centrifugal microfluidic platform
Rodrigo Martinez-Duarte, Robert A. Gorkin III, Kameel Abi-Samra and Marc J. Madou
Lab Chip, 10, 1030-1043, 2010

(CM-08-01) Fabrication and characterization of freestanding 3D carbon microstructures using multi-exposures and resist pyrolysis
Jung A Lee1, Seok Woo Lee1, Kwang-Cheol Lee2, Se Il Park2 and Seung S Lee1
1 Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1 Guseong-dong Yuseong-gu, Daejeon 305-701, Korea
2 Leading-Edge Technology Group, Korea Research Institute of Standards and Science (KRISS), 1 Doryong-dong Yuseong-gu, Daejeon 305-340, Korea
J. Micromech. Microeng Vol.18 035012 (2008)

(CM-08-02) Carbon post-microarrays for glucose sensors
Han Xua, Kartikeya Malladib, Chunlei Wangc, Lawrence Kulinskya, Mingje Songb, Marc Madoua
a Dept. of Mechanical and Aerospace Engineering, University of California, Irvine, CA 92697, USA
b Dept. of Material Science and Engineering, University of California, Irvine, CA 92697, USA
c Dept. of Mechanical and Materials Engineering, Florida Intern. University, Miami, FL 33174, USA
Biosensors and Bioelectronics Volume 23, Issue 11, 15 June 2008, Pages 1637-1644

(CM-08-03) Fabrication and characterization of three-dimensional carbon electrodes for lithium-ion batteries
Genis Turon Teixidor, Rabih B. Zaouk, Benjamin Y. Park, Marc J. Madou
Department of Mechanical and Aerospace Engineering, 4200 Engineering Gateway Building, University of California, Irvine, Irvine, CA 92697, USA
1 September 2008, Pages 730-740

(CM-08-04) Electrochemistry and Morphology Evolution of Carbon Micro-net Films for Rechargeable Lithium Ion Batteries
Chi-Lin Li, Qian Sun, Gong-Yu Jiang, Zheng-Wen Fu*† and Bao-Ming Wang
Department of Chemistry & Laser Chemistry Institute, Shanghai Key laboratory of Molecular Catalysts and Innovative materials, Fudan University, Shanghai, 200433, P.R.China, and Tianjin Institute of Power Sources, Tianjin, 300381, P. R. China
J. Phys. Chem. C, 2008, 112 (35), pp 13782–13788 DOI: 10.1021/jp800659n

(CM-08-05) Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon
Chunlei Wang 1, Rabih Zaouk 2, Benjamin Y. Park 3, Marc J. Madou 4
1 Department of Mechanical and Materials Engineering, Florida International University, 10555 W Flagler Street, EC 3463, Miami, FL 33174, USA.
2 Department of Mechanical and Aerospace Engineering, University of California, Irvine 4200 Engineering Gateway, Irvine, CA 92697-3975, USA.
3 Department of Mechanical and Aerospace Engineering, University of California, Irvine 4200 Engineering Gateway, Irvine, CA 92697-3975, USA.
4 Department of Mechanical and Aerospace Engineering, University of California, Irvine 4200 Engineering Gateway, Irvine, CA 92697-3975, USA
International Journal of Manufacturing Technology and Management
Vol. 13, No 2-4, p. 360-375, 2008

(CM-08-06) Three-dimensionally combined carbonized polymer sensor and heater
Ok Chan Jeonga, , Satoshi Konishib
a Dept. of Biomedical Engineering, Institute of Biomedical Engineering, INJE University, Rep. of Korea
b Dept. of Micro System Technology, Ritsumeikan University, Japan
Sensors and Actuators A: Physical Volume 143, Issue 1, 2 May 2008, Pages 97-105

(CM-07-01) SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography
A del Campo and C Greiner
Max-Planck-Institut für Metallforschung, Heisenbergstraße 3, 70569 Stuttgart, Germany
Journal of Micromechanics and Microengineering Volume 17 Number 6 (2007)

(CM-07-02) Toward Carbon Nanotube-Based AFM Cantilevers
Jianhua Tong; Yu Sun; Univ. of Toronto, Toronto
Nanotechnology, IEEE Transactions on, Vol.6, Issue: 5, p.519 – 523, Sept 2007

(CM-06-01) Fabrication of suspended carbon microstructures by e-beam writer and pyrolysis
Kartikeya Malladi, Chunlei Wang and Marc Madou
a Dept. of Mechanical and Aerospace Engineering, University of California, Irvine, CA 92697-3975.
Carbon, Volume 44, Issue 13, November 2006, Pages 2602-2607

(CM-05-01) A Novel Method for the Fabrication of High-Aspect Ratio C-MEMS Structures,
C. Wang, G. Jia, L. Taherabadi and M. Madou
J. of Microelectromech. Systems, Vol. 14(2), pp. 348-358, 2005.

(CM-05-02) From MEMS to NEMS with carbon
Chunlei Wang and Marc Madou
Dept. of Mechanical and Aerospace Engineering, University of Calif. at Irvine, Irvine, CA 92697, USA
Biosensors and Bioelectronics, Volume 20, Issue 10, 15 April 2005, Pages 2181-2187
Selected Papers from the Eighth World Congress on Biosensors, Part II

(CM-04-01) Carbon-MEMS architectures for 3D microbatteries
Chunlei Wang, Lili Taherabadi, Guangyao Jia, Sam Kassegne, Jim Zoval and Marc Madou1
Department of Mechanical and Aerospace Engineering, University of California, Irvine,
Irvine, CA 92697
Electrochemical and Solid-State Letters, 7, 11 A435-A438 (2004)

(CM-04-02) C-MEMS for the Manufacture of 3D Microbatteries
Chunlei Wang,a, Lili Taherabadi,a Guangyao Jia,a Marc Madou,a Yuting Yeh,b and Bruce Dunnb
a Dept. of Mechanical and Aerospace Engineering Univ. of Calif., Irvine, Irvine, CA 92697-3975
b Dept. of Materials Science and Engineering, Univ. of Calif., Los Angeles, Los Angeles, CA 90095-1595
Electrochemical and Solid-State Letters, 7, 11 A435-A438, 2004

(CM-02-01) Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical
Singh, A., Jayaram, J., Madou, M., Akbar, S.,
Applications, Journal of the Electrochemical Society, Vol. 149(3), pp. E78-E83, 2002.