(SM-11-01) Tribo-functionalizing Si and SU-8 materials by surface modification for application in MEMS/NEMS actuator-based devices
Author(s): Singh, RA; Satyanarayana, N; Kustandi, TS, et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 44 Issue: 1 Article Number: 15301 2011
(SM-11-02) Surface modification of 2D/3D SU-8 patterns with a swelling-deswelling method
Kim, Hye-Na (Department of Chemical and Biomolecular Engineering, Sogang University, 1 Sinsu-dong, Mapo-gu Seoul, Korea, Republic of); Kang, Ji-Hwan; Jin, Woo-Min; Moon, Jun Hyuk
Soft Matter, v 7, n 6, p 2989-2993, March 21, 2011
(SM-11-03) Effects of microstructure geometry and plasma modification on wetting properties of SU-8 surfaces
Kobayashi, Seiya (Yamagata Research Institute of Technology, Yamagata 990-2473, Japan); Makino, Eiji; Mineta, Takashi; Komatsuzaki, Tomohiro
Microelectronic Engineering, 2011
(SM-11-04) Chemical synthesis on SU-8
Katrine Qvortrup, Kennedy M. Taveras, Ole Thastrup, and Thomas E. Nielsen
Chem. Commun. 47 1309 (2011)
(SM-10-01) Stable superhydrophobic surfaces induced by dual-scale topography on SU-8
Jose Marquez-Velasco a,b, Maria-Elena Vlachopoulou a, Angeliki Tserepi a, Evangelos Gogolides a
a Institute of Microelectronics NCSR Demokritos, 15310 Aghia Paraskevi, Greece
b University of Seville, Physics Dept., Avda. Reina Mercedes s/n, 41012 Sevilla, Spain
Microelectronic Engineering 87 782–785, 2010
(SM-10-02) Effect of surface treatments/coatings and soft bake profile on surface uniformity and adhesion of SU-8 on a glass substrate
Samantha Grist, Jasbir N. Patel, Moeed Haq, Bonnie L. Gray, and Bozena Kaminska
Proc. SPIE 7593 75930F (2010)
(SM-10-03) Surface hydrophilization of SU-8 by plasma and wet chemical processes
Ferdinand Walther, Tanja Drobek, Alexander M. Gigler, Marc Hennemeyer, Michael Kaiser, Helmut Herberg, Tetsuji Shimitsu, Gregor E. Morfill, Robert W. StarkSurface and Interface Analysis Vol 42, Issue 12-13, p. 1735-44, 2010
(SM-09-01) Simple surface modification techniques for immobilization of biomolecules on SU-8
Author(s): Deepu, A; Sai, VVR; Mukherji, S
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE Volume: 20 Pages: 25-28, 2009
(SM-09-02) A low temperature surface modification assisted method for bonding plastic substrates
M-E Vlachopoulou1, A Tserepi1, P Pavli1, P Argitis1, M Sanopoulou2 and K Misiakos1
1 Institute of Microelectronics, NCSR ‘Demokritos’, 153 10 Aghia Paraskevi, Greece
2 Institute of Physical Chemistry, NCSR ‘Demokritos’, 153 10 Aghia Paraskevi, Greece
J. Micromech. Microeng. 19 (2009) 015007 (6pp)
(SM-08-01) Evaluation of nanoscale roughness measurements on a plasma treated SU-8 polymer surface by atomic force microscopy
Ferdinand Walther a, Wolfgang M. Heckl a,b, Robert W. Stark a,
a Center for NanoScience (CeNS) and Department of Earth and Environmental Sciences, Ludwig-Maximilians-Universita¨t Munchen, Theresienstrasse 41, 80333 Munich, Germany
b Deutsches Museum, Museumsinsel 1, 80356 Munich, Germany
Applied Surface Science 254 (2008) 7290–7295
(SM-08-02) Surface modification of gel-free microchannel surface electrophoresis device for DNA identification
Lee, HH; Ku, Y
JAPANESE JOURNAL OF APPLIED PHYSICS Volume: 47 Issue: 4 Pages: 2300-2305, 2008
(SM-08-03) Surface modification of SU-8 for enhanced biofunctionality and nonfouling properties
Tao, SL; Popat, KC; Norman, JJ, et al.
LANGMUIR Volume: 24 Issue: 6 Pages: 2631-2636, 2008
(SM-08-04) Functionalization of SU-8 photoresist surfaces with IgG proteins
Gabriela Blagoi a,*, Stephan Keller a, Alicia Johansson b, Anja Boisen a, Martin Dufva a
a Department of Micro and Nanotechnology, Technical University of Denmark, DTU Nanotech, DK-2800 Kongens Lyngby, Denmark
b PhotoSolar ApS, Gregersensvej 1A, DK-2630 Taastrup, Denmark
Applied Surface Science 255, 2896–2902, 2008
(SM-07-01) Stability of the hydrophilic behavior of oxygen plasma activated SU-8
Ferdinand Walther1, Polina Davydovskaya1, Stefan Z¨urcher2, Michael Kaiser3, Helmut Herberg3, Alexander M Gigler1 and Robert W Stark1
1 Center for Nanoscience CeNS and Department of Earth and Environmental Sciences,
Ludwig-Maximilians-Universit¨at M¨unchen, Theresienstr. 41, 80333 Munich, Germany
2 Laboratory for Surface Science and Technology, ETH Zurich, Wolfgang-Pauli-Strasse 10, 8093 Zurich, Switzerland
3 Munich University of Applied Sciences, Lothstr. 34, 80335 Munich, Germany
J. Micromech. Microeng. 17 524–531, 2007
(SM-07-02) Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion
Nishimoto, K; Ishizawa, N; Ueda, H, et al.
JOURN. OF ADV. MECH. DESIGN SYS. AND MANUF. Vol.: 2 Issue: 2 Pages: 197-202, 2007
(SM-07-03) A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS
Joshi, M; Kale, N; Lal, R, et al.
BIOSENSORS & BIOELECTRONICS Vol. 22 Issue: 11 Pages: 2429-2435 May 15 2007
(SM-07-04) Surface modification of SU-8 photoresist for shrinkage improvement in a monolithic MEMS microstructure
Chung, CK; Hong, YZ
Department of Mechanical Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Taiwan, Republic of China
JOURNAL OF MICROMECHANICS AND MICROENGINEERING Vol. 17 Issue: 2 Pages: 207-212 Feb 2007
(SM-07-05) Silanization and antibody immobilization on SU-8
Manoj Joshi a, Richard Pinto b, V. Ramgopal Rao b, Soumyo Mukherji a
a School of Biosciences and Bioengineering, Indian Institute of Technology Bombay, Mumbai, India
b Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India
Applied Surface Science (2007)
(SM-07-06) Surface graft polymerization of SU-8 for bio-MEMS applications
Yuli Wang, Jeng-Hao Pai, Hsuan-Hong Lai, Christopher E Sims, Mark Bachman, G P Li and Nancy L Allbritton
Journal of Micromechanics and Microengineering Volume 17 Number 7, 2007
(SM-06-01) Off-wafer fabrication and surface modification of asymmetric 3D SU-8 microparticles
Tao, S L; Popat, K; Desai, T A
NATURE PROTOCOLS Volume: 1 Issue: 6 Pages: 3153-3158 Published: 2006
(SM-06-02) Ultralow hysteresis superhydrophobic surfaces by excimer laser modification of SU-8
Wagterveld, R M; Berendsen, C W J; Bouaidat, S, et al.
LANGMUIR Volume: 22 Issue: 26 Pages: 10904-10908 Published: 2006
(SM-06-03) Surface modification of SU-8 by photografting of functional polymers for lab-on-a-chip applications
Zhan Gao; Henthorn, D.B.; Chang-Soo Kim;
Sensors, 2006. 5th IEEE Conference on; Page(s): 121 – 123, 2006
(SM-05-01) Functionalized SU-8 patterned with x-ray lithography
Balslev, S.; Romanato, F.;
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume: 23 , Issue: 6; Page(s): 2910 – 2913, 2005
(SM-05-02) Argon Plasma Modification of SU-8 for Very High Aspect Ratio and Dense Copper Electroforming
Jun Zhang, W. X. Zhou, Mary B. Chan-Park, and Samuel R. Conner
J. Electrochem. Soc. 152 Issue: 10 P:C 716-721 C716 (2005)
(SM-03-01) Fabrication of micro-optical components in polymer using proton beam micro-machining and modification
Bettiol, AA; Sum, TC; van Kan, JA, et al.
Source: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS Volume: 210 Pages: 250-255, 2003
(SM-02-01) Effects of Surface Treatments on the Adhesion of Cu and Cr/Cu Metallizations to a Multifunctional Photoresist
J. Ge and J. K. Kivilahti
Journal of Applied Physics 92, 6 Sept 15 2002