Photoresists & Specialty Chemicals
Micro Molds and Stamps Using SU-8 or KMPR®
Part of the Applications Notes Line
There is a need for faster and less expensive techniques to produce microstructures in PDMS, PMMA and other materials. SU-8 Series micro molds and stamps are being used for this purpose. Using photolithography, a design can easily be defined on a silicon wafer creating a mold quickly and easily. A typical application is microfluidic components and systems. Devices can be fabricated rapidly to move from research, to prototyping, and eventually to large-scale production.
Advantages of SU-8 and KMPR® UV fabricated micro molds
- Low cost fabrication
- Possibility to superimpose several levels
- High photoresist thickness
- Simple coating > 100 µm
- Multiple coatings > several hundred µm
- Rapid proto-typing
- Reusable
SU-8 for producing micro gears using electroforming
A 180 µm thick KMPR® photoresist mold deposited using a multiple spin coating process.
SEMs Source: Electrochemical Co-deposition of Metal-Nanoparticle Composites for Microsystem Apps.
Kyle Jiang, School of Mechanical Engineering, University of Birmingham, UK, B15 2TT