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Overview

Conventional pattern transfer and single-layer lift-off for microelectronics and micro systems technology

  • High wet and dry etch resistance
  • Good thermal stability of the resist pattern
  • Tunable pattern profile: vertical to undercut

Applications

  • Single layer lift-off

Recommended ancillaries

Remover PG

To strip PMGI, LOR, PMMA, KMPR® 1000 & minimally cross-linked SU-8 resists
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MRT Developers

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MRT Removers

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