SU-8 TF 6000 resists are available in five standard viscosities, as shown in Table 1. The film thickness vs. spin speed curves are displayed in Figure 1a and 1b. The curves were generated using a Brewer Science, Model # Cee 200 coater, static dispense on 6 inch (150 mm) silicon wafers and a soft bake of 110°C (times listed in Table 2) on a level hot plate. Please note that the exact thickness obtained may be slightly offset from Figure 1 due to equipment type, coat program and environmental conditions.
