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Overview

Engineered for broadband applications, MEGAPOSIT™ SPR™3000 Series Photoresists provide excellent process latitude and high throughput, making it ideal for advanced photolithography requirements.

Key features

  • Excellent adhesion
  • Superior coating uniformity
  • Glycol ether- and xylene-free solvent system

Recommended ancillaries

Remover PG

To strip PMGI, LOR, PMMA, KMPR® 1000 & minimally cross-linked SU-8 resists
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Remover 1112A

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Remover 1165

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M-351 Developer

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MF-26A Developer

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EBR-10A Edge Bead Remover

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Note

Kayaku Advanced Materials, Inc.’s distribution of Qnity Electronic Materials semiconductor and advanced packaging products—for which Kayaku serves as Qnity’s exclusive representative in North America—is strengthened by our value‑added services grounded in deep chemical and formulary expertise, extensive applications experience, and robust process engineering capabilities. Kayaku Advanced Materials only represents Qnity in North America.

Find additional Qnity materials for your applications.