Dyed i-Line photoresist engineered for high throughput processing on reflective substrates, with multiwavelength capability and compatibility across a wide range of developer families.
The MEGAPOSIT™ SPR™ 3600M Series is a dyed i-Line photoresist designed for microlithography applications requiring high throughput on reflective substrates. Its dyed formulation provides effective control over reflective notching and CD variation, delivering a 32% swing curve reduction compared to undyed alternatives.
Kayaku Advanced Materials, Inc.’s distribution of Qnity Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise. Kayaku Advanced Materials only represents Qnity in North America.
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