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Overview

The MEGAPOSIT™ SPR™ 660 Series supports linear resolution down to 0.325 µm over silicon substrates and below 0.300 µm over anti-reflectant coatings, with a depth of focus up to 1.5 µm for line/space applications. The SPR 660 product family includes a range of undyed dilutions as well as low and medium dye loadings for improved processing over reflective surfaces. It is compatible with 0.24N and 0.26N developers and carries a 12-month shelf life.

Key features

  • Performs in both line/space and contact hold applications
  • Family includes range of undyed dilutions and two dye loadings
  • Performs on a variety of substrates including silicon, silicon dioxide, titanium nitride, and organic anti-reflectant coatings
  • High throughput

Applications

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Note

Kayaku Advanced Materials, Inc.’s distribution of Qnity Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise. Kayaku Advanced Materials only represents Qnity in North America.

Find additional Qnity materials for your applications.

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