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Overview

Positive DUV photoresist developed for deep implant applications.

Key features

  • Low viscosity allows for reduced dispense volume
  • Improved coating uniformity for films ranging from 1.1 to 3.0 µm
  • 150°C thermal stability

Applications

  • General Lithography

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Note

Kayaku Advanced Materials, Inc.’s distribution of Qnity Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise. Kayaku Advanced Materials only represents Qnity in North America.

Find additional Qnity materials for your applications.