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Overview

Multipurpose resist that can be utilized for gate, phase shift mask contact holes, and trench applications in the 180-130 nm CD range.

Key features

  • Compatible with a wide range of substrates including silicon and both organic and inorganic anti-reflective materials
  • 150°C thermal stability

Applications

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Note

Kayaku Advanced Materials, Inc.’s distribution of Qnity Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise. Kayaku Advanced Materials only represents Qnity in North America.

Find additional Qnity materials for your applications.

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