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Overview

This resist is targeted for FAS throughput device production rules down to 150 nm.

Key features

  • 10.0 -20.0 mJ/cm2 for lines/spaces
  • Varied depth of focus
  • 175°C thermal stability

Applications

  • 150 -180 nm nodes high etch resistance

Recommended ancillaries

Remover 1165

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MF-26A Developer

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CD-26 Developer

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Note

Kayaku Advanced Materials, Inc.’s distribution of Qnity Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise. Kayaku Advanced Materials only represents Qnity in North America.

Find additional Qnity materials for your applications.

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