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E-beam Resists

mr-PosEBR

Acrylate-based positive e-beam resists
High dry etch resistance for pattern transfer

ma-N 2400

Deep UV & e-beam resists
50 nm resolution with e-beam
High plasma etch stability

At Kayaku Advanced Materials, Inc. we believe that great innovation arises from the careful combination of proven experience, true partnerships, and a spark of imagination.

200 Flanders Road
Westborough, MA 01581 USA
Tel: 617-965-5511

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General Disclaimer :

Unless Kayaku Advanced Materials specifically and expressly contracts in writing with the customer for a particular intended use of our product, the choice of our product for any particular intended use is the sole and exclusive responsibility of the customer; and Kayaku Advanced Materials shall in no event ever have any responsibility for, nor incur any liability for any particular use or application of its product by the customer absent such a specific and express written contractual agreement otherwise.

Kayaku Advanced Materials ^®
Chemical Solutions for MEMS and Microelectronics, and Functional Electronic Inks.
Paratronix^®
Parylene Conformal Coating Services and Equipment
Nippon Kayaku Co., Ltd.
Functional Chemicals, Pharmaceuticals, Safety Systems and Agrochemicals.

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