SU-8 2000 chemically amplified, i-Line resists are well-suited for the fabrication of permanent device structures. These negative tone, epoxy based resists exhibit excellent chemical resistance and low Young’s Modulus which makes them ideal for fabricating micro/nano structures such as cantilevers, membranes, and microchannels.
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Source: Kayaku Advanced Materials, Inc.

Source: micro resist technology

Source: Genoletet, al., IBM-Zurich, Rev. Sci., Instrum., 70, 2398 (1999)

Source: N Chronis, LP Lee, UC Berkeley, μTAS 2002, 754 (2002)