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UV™ 135 Positive DUV Photoresist

Part of the Dupont Line
Electronic Materials

An advanced resist for 130 nm design rules:

  • Low iso-dense bias
  • Maximum isolated film retention to <110 nm
  • Compatible with PSM & OPC assist features to enlarge process windows

Ancillaries:

Applications:

  • 130 nm device node

Kayaku Advanced Materials, Inc.’s distribution of DuPont Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.

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Nanoimprint Lithography

At Kayaku Advanced Materials, we offer a wide variety of product lines designed to cater to your unique needs.

Nanoimprint Lithography

At Kayaku Advanced Materials, we offer a wide variety of product lines designed to cater to your unique needs.