MEGAPOSIT™ SPR™3000 Series Photoresists

Positive photoresist engineered for i-Line, g-Line, and broadband applications with high resolution, high throughput, and excellent process latitudes

  • Glycol ether- and xylene-free solvent system
  • Excellent adhesion
  • Superior coating uniformity



  • Wet Etch
  • Dry Etch

Kayaku Advanced Materials, Inc.’s distribution of DuPont Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.

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