micro resist technology
Specialty Photoresists
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mr-NIL 6000E

Part of the Micro Resist Technology Line
Specialty Photoresists

UV-curable material for permanent applications with isothermal processing

  • Excellent film quality on various substrate materials
  • Very low residual layer thickness < 10 nm
  • Excellent pattern transfer fidelity

Data sheet:

Applications:

  • Thermal NIL
  • Pattern Transfer