SU-8 3000

SU-8 3000 is a high contrast, epoxy-based photoresist designed for micro-machining and other microelectronic applications, where a thick, chemically and thermally stable image is desired. SU-8 3000 is an improved formulation of SU-8 and SU-8 2000, which has been widely used by MEMS producers for many years. SU-8 3000 has been formulated for improved adhesion and reduced coating stress. The viscosity range of SU-8 3000 allows for film thicknesses of 4 to 100 μm in a single coat. SU-8 3000 has excellent imaging characteristics and is capable of producing very high, over 5:1 aspect ratio structures. SU-8 3000 has very high optical transmission above 360 nm, which makes it ideally suited for imaging near vertical sidewalls in very thick films. SU-8 3000 is best suited for permanent applications where it is imaged, cured and left on the device.

Material attributes:

  • Improved adhesion
  • Reduced coating stress
  • Vertical sidewalls
  • Greater than 100 μm film thickness in a single coat
  • Excellent dry etch resistance

Material uses:

  • Waveguides
  • Microfluidics
  • Stamps

10µm features in 50µm SU-8 3000 (contact expose)
Source: Kayaku Advanced Materials, Inc.