Specialty Photoresists
mr-I 7000R/8000R
Part of the Micro Resist Technology LineThermoplastics with built-in release properties for use as etch mask for pattern transfer and the fabrication of nanopatterns
- Excellent properties for thermal NIL
- Longer life-time of anti-sticking layers on the mold
- High plasma etch resistance
Data sheet:
Applications:
- Thermal NIL
- Pattern Transfer