General purpose, high-throughput, i-Line photoresist for 0.35 µm front-end and back-end applications
- Dense lines/spaces and isolated lines on polysilicon, and in high-aspect ratio films on TiN
- Contact holes on oxide
- Fast photo speed
- High Resolution i-Line
- Bi-layer Lift-off
Kayaku Advanced Material’s, Inc. distribution of DuPont Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.
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