ma-P 1200LIL
Thin Positive Resists for Laser Interference Lithography
High quality etch patterns due to steep sidewalls
Good etch resistance
100-500 nm film thickness
Data Sheet
Applications
- Laser Interference Lithography
- Pattern Transfer
Thin Positive Resists for Laser Interference Lithography
High quality etch patterns due to steep sidewalls
Good etch resistance
100-500 nm film thickness
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