MEGAPOSIT™ SPR™3600M Series Advanced i-Line Photoresists

Dyed photoresist for extremely high throughput processing on reflective substrates

  • Broadband, g-Line and i-Line capable
  • Thermal stability ≥125°C
  • Compatible across a wide variety of developer families



  • High Resolution i-Line
  • Bi-layer Lift-off

Kayaku Advanced Materials, Inc.’s distribution of DuPont Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.

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