MEGAPOSIT™ SPR™660 Series Advanced i-Line Photoresists

Designed for processing 0.350 micron features and larger

  • Performs in both line/space and contact hold applications
  • Performs on a variety of substrates including silicon, silicon dioxide, titanium nitride, and organic anti-reflectant coatings
  • Family includes range of undyed dilutions and two dye loadings
  • High throughput



  • High Resolution i-Line
  • Bi-layer Lift-off

Kayaku Advanced Materials, Inc.’s distribution of DuPont Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.

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