DuPont™
Electronic Materials
Home 5 Product 5 MEGAPOSIT™ SPR™660 Series Advanced i-Line Photoresists

MEGAPOSIT™ SPR™660 Series Advanced i-Line Photoresists

Part of the Dupont Line
Electronic Materials

Designed for processing 0.350 micron features and larger

  • Performs in both line/space and contact hold applications
  • Performs on a variety of substrates including silicon, silicon dioxide, titanium nitride, and organic anti-reflectant coatings
  • Family includes range of undyed dilutions and two dye loadings
  • High throughput

Ancillaries:

Applications:

  • High Resolution i-Line
  • Bi-layer Lift-off

Kayaku Advanced Materials, Inc.’s distribution of DuPont Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.

Find additional DuPont materials for your applications.

BACK TO ALL PRODUCTS

FEATURED APPLICATIONS

Product Applications

Nanoimprint Lithography

At Kayaku Advanced Materials, we offer a wide variety of product lines designed to cater to your unique needs.

Nanoimprint Lithography

At Kayaku Advanced Materials, we offer a wide variety of product lines designed to cater to your unique needs.