SU-8 TF 6000 is a high-contrast, chemically amplified, negative tone epoxy-based resist that is sensitive to broadband UV radiations (i-, h- and g-Line) and is recommended wherever high resolution, photoimageable, thin, permanent structures are required. SU-8 TF 6000 is available in five standard viscosities to achieve low defect coatings with film thicknesses ranging from ~ 0.4 to 16 µm in a single coat process.
Material attributes:
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Material uses:
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1 µm L/S – 0.5 µm thick SU-8 TF 6000
Source: Kayaku Advanced Materials, Inc.
1 µm trenches – 0.5 µm thick SU-8 TF 6000
Source: Kayaku Advanced Materials, Inc.