SU-8 TF 6000 negative resists are sensitive to broadband UV radiations (i-, h- and g-line) and recommended wherever high resolution, photo-imageable thin permanent structures are required.
Material uses:
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1 µm L/S – 0.5 µm thick SU-8 TF 6000
Source: Kayaku Advanced Materials, Inc.

1 µm trenches – 0.5 µm thick SU-8 TF 6000
Source: Kayaku Advanced Materials, Inc.