Electronic Materials
UV™6 Positive DUV Resist
Part of the Dupont LineOptimized to provide vertical profile imaging of dense and semi-isolated features for device production design rules to 180 nm
- Superior etch resistance
- Wide process window
- 150° thermal stability
Ancillaries:
- CD-26 Developer
- Remover 1165
- EBR-10A Edge Bead Remover
Applications:
- General Lithography: Positive DUV Resists
Kayaku Advanced Materials, Inc.’s distribution of DuPont Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.
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