UV™6 Positive DUV Resist

Optimized to provide vertical profile imaging of dense and semi-isolated features for device production design rules to 180 nm

  • Superior etch resistance
  • Wide process window
  • 150° thermal stability



  • General Lithography: Positive DUV Resists

Kayaku Advanced Materials, Inc.’s distribution of DuPont Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.

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