Kayaku Advanced Materials, Inc. PermiNex® 1000 and 2000 resists are epoxy based, photo-imageable bonding resist used as an adhesive layer for the definition and capping of cavity structures such as BAW, SAW, microfluidic devices, and others, where critical alignment, low temperature processing and high bond quality are desired.
Material Attributes:
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Resolution Capability
Source: Kayaku Advanced Materials
Bonding Capability
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Si to Glass bonded wafers, 10µm thick PermiNex® adhesive structure Source: Kayaku Advanced Materials |