SU-8 Negative Epoxy Resists
Kayaku Advanced Materials, Inc. epoxy resists consist of chemically amplified, epoxy-based negative resists that are highly functional, and photo-imageable to near UV (365nm) radiation. Cured films or microstructures are very resistant to solvents, acids and bases and have excellent thermal and mechanical stability, making them well suited for fabricating permanent structures such as pixel walls, fluidic channels and nozzles, micro arrays and spacers.
|Epoxy Resists||Features||UV |
|i-line||10-200 µm||>10:1 Aspect Ratio|
|i-line||10-100 µm||>10:1 Aspect Ratio|
|i-line||10-70 µm||>5:1 Aspect Ratio|
SU-8 TF 6000
|g-, h-, i-line||0.5-10 µm||High resolution|