Technical References for Micro Molds and Stamps

(MMo-11-01) Electroforming of Ni mold for imprint lithography using high-aspect-ratio PMMA microstructures fabricated by proton beam writing
Tanabe, Yusuke (Dept. of Electrical Engineering, Shibaura Institute of Technology, 3-7-5 Toyosu, Koto-ku, Tokyo 135-8548, Japan); Nishikawa, Hiroyuki; Seki, Yoshihiro; Satoh, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Watanabe, Tohru; Sekiguchi, AtsushiMicroelectronic Engineering, 2011

(MMo-11-02) Microcontact printing of biomolecular gratings from SU-8 masters duplicated by Thermal Soft UV NILAmandine M. C. Egea, Christophe Vieu
Microelectronic Engineering, Volume 88 Issue 8, August, 2011

(MMo-11-03) Sealing SU-8 microfluidic channels using PDMS Zhiyi Zhang1, Ping Zhao1, Gaozhi Xiao1, Benjamin R. Watts2, and Changqing Xu21Institute for Microstructural Science, NRC Canada, Ottawa, Ontario K1A 0R6, Canada
2Department of Engineering Physics, McMaster University, Hamilton, Ontario L8S 4L7, CanadaBiomicrofluidics 5, 046503 (2011); doi:10.1063/1.3659016 (8 pages)

(MMo-10-01) Fabrication and Characterization of the Capillary Performance of Superhydrophilic Cu Micropost ArraysY. Nam, S. Sharratt, and Y. S. Ju µS Mech. and Aerospace Engineering Dept., UC, Los Angeles, CAC. Byon and S. J. Kim – Korean Advanced Institute of Science and Tech., Daejeon 305-701, ROKJOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2010)

(MMo-10-02) UV Lithography and Molding Fabrication of Ultrathick Micrometallic Structures Using a KMPR Photoresist Young-Min Shin® Gamzina, D.® Barnett, L.R.® Yaghmaie, F.® Baig, A.® Luhmann, N.C.®
Dept. of Appl. Sci., Univ. of California, Davis, CA, USAMicroelectromechanical Systems, Journal of
June 2010, 19 Issue: 3, page(s): 683 – 689

(MMo-10-03) Reducing SU-8 hygroscopic swelling by ultrasonic treatmentDu Liqun1, 2,*, Zhang Benzhuang2 and Liu Yaping2 . 2, 197-203 (2010). doi: 10.5101/nml.v2i3. p197-203Nano-Micro Letters, Vol. 2, No.3 197-203, 2010

(MMo-10-04) Electrochemical Co-deposition of Metal-Nanoparticle Composites for Microsystem ApplicationsKyle JiangSchool of Mechanical Engineering, University of Birmingham, UK, B15 2TTSource: Cutting Edge Nanotechnology, ISBN 978-953-7619-93-0, Edited by: D. Vasileska
Publisher: InTech, March 2010

(MMo-09-01) Characterization of hybrid molding and lithography for SU-8 micro-optical components
Aaron T. Cannistra and Thomas J. Suleski
J. Micro/Nanolith. MEMS MOEMS 9, 013025 (2010)Proc. SPIE 7205 720517 (2009)

(MMo-09-02) Fabrication Process of 3D Micro Components from Stainless Steel Aqueous SlurryMohamed Imbaby and Kyle Jiang, Member, IAENGProceedings of the World Congress on Engineering, 2009Vol I WCE, July 1 – 3, 2009, London, U.K.

(MMo-09-03) Microstructuring of 45-® µm-Deep Dual Damascene Openings in SU-8/Si by UV-Assisted Thermal Imprinting with Opaque Mold®
Sung-Won Youn, Akihisa Ueno, Masaharu Takahashi, and Ryutaro Maeda
Jpn. J. Appl. Phys. 48 06FH09 (2009)Microelectronic Engineering, Volume 88 Issue 8, August, 2011

(MMo-08-01) Microtransfer molding of SU-8 micro-optics®
A. Cannistra, P. Srinivasan, E. G. Johnson, and T. J. Suleski
Proc. SPIE 6883 68830C (2008)

(MMo-08-02) Biochemical Sample Divider Fabricated by SU-8 Mold Process Koyama, M.; Imai, R.; Shikida, M.; Okochi, M.; Tsuchiya, H.; Honda, H.; Sato, K.;
Micro-NanoMechatronics and Human Science, 2008. MHS 2008. International Symposium on
Digital Object Identifier: 10.1109/MHS.2008.4752489
2008 , Page(s): 420 – 423

(MMo-08-03) Large-area, high-aspect-ratio SU-8 molds for the fabrication of PDMS microfluidic devices
S Natarajan1,2, D A Chang-Yen2,3 and B K Gale2,31 Department of Chemical Engineering, University of Utah, USA
2 Center of Excellence for Biomedical Microfluidics, University of Utah, USA
3 Department of Mechanical Engineering, University of Utah, USA® J. Micromech. Microeng. 18 045021 doi:10.1088/0960-1317/18/4/045021 (2008)

(MMo-08-04) UV-assisted Thermal Imprint of SU-8 Using Nickel Mold Sung-Won Youn; Ueno, A.; Takahashi, M.; Maeda, R.;
Smart Manufacturing Application, 2008. ICSMA 2008. International Conference on
Digital Object Identifier: 10.1109/ICSMA.2008.4505559
Page(s): 389-392-2008

Metal foundation construction to consolidate electroplated structures for successful removal of SU-8 mould®
F. Cui, W.-Y. Chen, X.-L. Zhao, X.-M. Jing, and X.-S. Wu
Electron. Lett. 42 690 (2006)

Fabrication of polydimethylsiloxane microfluidics using SU-8 Rabih Zaouk, Benjamin Y Park, Marc J MadouMethods In Molecular Biology Clifton Nj (2006), Vol.: 321,Publisher: Humana Press, Pages: 17-21 PubMed: 16508061